Advanced Specialty Gas Equipment

MASS FLOW SYSTEMS
Sensors-Specifications and Materials of Construction

ASGE Mass Flow Sensor

Table VI, Specifcations-Mass Flow Sensors

  Fast Response
Sensors
1FRM-17FRM
Fast Response
Sensors
18FRM-19FRM
Fast Response
Sensors
20FRM-24FRM
Operating Pressure Range 570 torr to 4500 psig 570 torr to 1500 psig 570 torr to 1500 psig
Operating Temperature Range 40°F to 150°F 40°F to 150°F 40°F to 150°F
Maximum Flow Capacity See Table VIII See Table VIII See Table VIII
Minimum Flow Capacity 2% of max.
flow capacity
2% of max.
flow capacity
2% of max.
flow capacity
Accuracy ± 1% of full scale
at calibrated conditions
± 1% of full scale
at calibrated conditions
± 1% of full scale
at calibrated conditions
Repeatability ± 0.25% of full scale ± 0.25% of full scale ± 0.25% of full scale
Response Time 3 seconds max¹ 3 seconds max¹ 3 seconds max¹
Pressure Drop 10" water column
at maximum flow
10" water column
at maximum flow
10" water column
at maximum flow
Mounting Attitude Sensitivity ±0.5% of Full Scale² ±0.5% of Full Scale² ±0.5% of Full Scale²
Inlet and Outlet Connections 1/4" compression³ 3/8" compression³ 1/2" NPT female5
Dimensions (inches) 5.50 x 1.48 x 4.324 5.50 x 1.48 x 4.324 7.00 x 3.30 x 6.10
Weight (approximate) 2 lbs. 2 lbs. 13 lbs.
Electrical Connection 15-pin Type D
male connector
15-pin Type D
male connector
15-pin Type D
male connector
Power Requirements +15 VDC at 35mA
-15 VDC at 35mA
+15 VDC at 35mA
-15 VDC at 35mA
+15 VDC at 35mA
-15 VDC at 35mA
Flow Output Signal 0-5 VDC into 3000 ohm
(or greater) load
0-5 VDC into 3000 ohm
(or greater) load
0-5 VDC into 2000 ohm
(or greater) load
1. To within 2% of set points.
2. Maximum deviation from stated accuracy specification.
3. VCR® connections are available on special order.
4. Dimensions include compression end connectors.
5. 1" or 1 1/2" NPT or 1/2", 3/4" or 1" compression connections available on special order.

Table VII, Materials of Construction-Mass Flow Sensors (All Models)

Metal Parts Exposed to Gas: Type 316 Stainless Steel
Seals: Viton® (Buna-N or Kalrez® Seals available on special order)

 
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